Display Panel Surface Micro-Defect AOI Machine
A two-cabinet AOI machine for surface micro-defects on display panels, with a 2D inspection station and a 3D inspection station, each on its own XY linear-motor marble platform. Panels are loaded manually, the panel ID is read and the panel goes through USC cleaning; the 2D station inspects for scratches, dimples and chipping, a transfer robot moves the panel to the 3D station for dimple and dent depth inspection, and the panel is unloaded with an OK/NG result. Model changeover covers 7~17.3 inch panels.

- 2D inspection XY-direction accuracy
- ≥10 um
- 3D inspection Z-direction accuracy
- ≥1 um
- XY repeat positioning accuracy
- ±2 um
- Model changeover range
- 7~17.3 inch
Specifications
- Defect types
- 2D station: panel scratch, lead scratch, chipping, dimple; 3D station: dimple, dent
- Detectable defect size (2D)
- Scratch / dimple / chipping: length/width ≥10um
- Detectable defect depth (3D)
- ≥1um
- Overkill rate
- <5%
- Escape rate
- <0.05%
- Panel sizes shown
- 17.3inch (394.10X226.60mm); 15.2inch (348.16X200.69mm); 13.3inch (286.40X165.60mm); 7inch (172.12X83.11mm)
- Suitable products
- Display panels
- Loading/unloading method
- Manual loading; OK/NG result given at unloading
- Process
- Manual loading → panel ID reading (VCR) → USC cleaning → 2D inspection → robot transfer → 3D inspection → unloading (OK/NG)
- Main modules
- 2D inspection, panel ID VCR, USC cleaning, transfer robot, 3D inspection, 2D XY linear-motor marble platform, 3D XY linear-motor marble platform, loading module, unloading module
- Algorithm
- CV algorithm + AI deep learning
See it in action
Silent clips from our 3D machine animations. While a clip is playing, you can pause it from the corner button.

3D animation Transfer: the robot lifts the panel off the 2D station and sets it down on the stage of the 3D station.
Highlights

2D + 3D inspection in one machine: a 2D station for scratches, dimples and chipping, and a 3D station for dimple and dent depth

Each station runs on its own XY linear-motor marble platform; XY repeat positioning accuracy ±2um

Detects scratch, dimple and chipping defects with length/width ≥10um

3D station scans the panel with a laser line and inspects defect depth ≥1um

CV algorithm + AI deep learning

Defect mapping: defect positions are plotted on a map of the panel

Panel ID reading and USC cleaning before inspection

Model changeover for 7~17.3 inch panels

Down-flow air inside the enclosure

Overkill rate <5%, escape rate <0.05%
Typical application
Surface micro-defect inspection of display panels
Interested in this product?
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