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Visual Inspection Equipment

Display Panel Surface Micro-Defect AOI Machine

A two-cabinet AOI machine for surface micro-defects on display panels, with a 2D inspection station and a 3D inspection station, each on its own XY linear-motor marble platform. Panels are loaded manually, the panel ID is read and the panel goes through USC cleaning; the 2D station inspects for scratches, dimples and chipping, a transfer robot moves the panel to the 3D station for dimple and dent depth inspection, and the panel is unloaded with an OK/NG result. Model changeover covers 7~17.3 inch panels.

Display Panel Surface Micro-Defect AOI Machine
2D inspection XY-direction accuracy
≥10 um
3D inspection Z-direction accuracy
≥1 um
XY repeat positioning accuracy
±2 um
Model changeover range
7~17.3 inch

Specifications

Defect types
2D station: panel scratch, lead scratch, chipping, dimple; 3D station: dimple, dent
Detectable defect size (2D)
Scratch / dimple / chipping: length/width ≥10um
Detectable defect depth (3D)
≥1um
Overkill rate
<5%
Escape rate
<0.05%
Panel sizes shown
17.3inch (394.10X226.60mm); 15.2inch (348.16X200.69mm); 13.3inch (286.40X165.60mm); 7inch (172.12X83.11mm)
Suitable products
Display panels
Loading/unloading method
Manual loading; OK/NG result given at unloading
Process
Manual loading → panel ID reading (VCR) → USC cleaning → 2D inspection → robot transfer → 3D inspection → unloading (OK/NG)
Main modules
2D inspection, panel ID VCR, USC cleaning, transfer robot, 3D inspection, 2D XY linear-motor marble platform, 3D XY linear-motor marble platform, loading module, unloading module
Algorithm
CV algorithm + AI deep learning

See it in action

Silent clips from our 3D machine animations. While a clip is playing, you can pause it from the corner button.

  • 3D animation Transfer: the robot lifts the panel off the 2D station and sets it down on the stage of the 3D station.

Highlights

  • 2D + 3D inspection in one machine: a 2D station for scratches, dimples and chipping, and a 3D station for dimple and dent depth

  • Each station runs on its own XY linear-motor marble platform; XY repeat positioning accuracy ±2um

  • Detects scratch, dimple and chipping defects with length/width ≥10um

  • 3D station scans the panel with a laser line and inspects defect depth ≥1um

  • CV algorithm + AI deep learning

  • Defect mapping: defect positions are plotted on a map of the panel

  • Panel ID reading and USC cleaning before inspection

  • Model changeover for 7~17.3 inch panels

  • Down-flow air inside the enclosure

  • Overkill rate <5%, escape rate <0.05%

Typical application

Surface micro-defect inspection of display panels

Interested in this product?

Contact our engineering team for pricing and technical details.

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